Applied Materials社の請求項 #529

5570994
Applied Materials
A method of transferring substrates under conditions of varying pressure, comprising the steps of: (a) moving a substrate when the ambient pressure is relatively high using a substrate support provided with at least one vacuum port capable of engaging an undersurface of said substrate during such movement; and (b) moving a substrate when the ambient pressure is relatively low by: (i) removably mounting to said substrate support a substrate support tray capable of engaging and supporting a bottom surface of said substrate; (ii) placing said substrate on said substrate support tray by engaging and supporting said bottom surface of said substrate with said substrate support tray and (iii) moving said retained substrate by moving said substrate support and said substrate support tray mounted on said substrate support.