Applied Materials社の請求項 #559

5549756
Applied Materials
A thin film deposition system comprising: a susceptor for supporting a deposition substrate during a deposition process; a channel formed in said susceptor, said channel having an opening on an upper surface of said susceptor; an infrared detector disposed to receive an optical signal that passes through said channel along an optical path from said opening to said infrared detector, wherein said infrared detector is disposed so as to image portion of a deposition substrate disposed on said susceptor so that said infrared detector can receive infrared radiation emitted by a deposition substrate during a deposition process; and a hollow lightguide disposed within said channel and extending from said susceptor, wherein said lightguide further defines said optical path from said opening to said infrared detector.