Applied Materials社の請求項 #519

6036874
Applied Materials
A method for forming a chamber in a layer on a substrate, the method comprising the steps of: a) forming a first layer on the substrate; b) shaping material in the first layer into a mold shape using an etch technique; c) forming a second layer over the substrate and the mold shape; d) exposing at least a portion of the mold shape; and e) removing the mold shape to define a chamber in the second material.