critical

従来のシリコン源と成膜プロセスを用いる場合、核生成が極めて重要で、核生成はほぼ基板の品質に依存している。

When using conventional silicon sources and deposition processes, nucleation is very important and critically dependent on substrate quality.

特許公表２００５－５０３０００
WO02065517より引用

●critical
extremely important because a future situation will be affected by it syn crucial: a critical factor in the election campaign
* Reducing levels of carbon dioxide in the atmosphere is of critical importance.
* Your decision is critical to our future.
--> note at essential
（OALDより引用）