be (also) introduced into

第４に、流量９０ｓｃｃｍ(inject)のジボラン（１００ｐｐｍ、２ｓｌｍの超高純度水素ガス）を反応室に導入する一方で、ゲルマンの流量を、１０秒間１５ｓｃｃｍに変化させた。

Fourth, the flow was changed to 15 sccm for 10 seconds while a flow of 90 sccm (inject) of diborane (100 ppm, 90 sccm mixed with 2slm ultra-pure hydrogen) was also introduced into the reactor.

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